News

2024

[Award] Irini received the Best Poster Presentation at the 2024 Research and Project Showcase (RAPs), hosted by Clarkson University. Congrats!!

[Award] Wafi received the Dr. Lewis J. Derzansky Memorial Graduate Scholarship Award at Clarkson’s Celebration & Recognition of Excellence Weekend, 2024. Congrats!!

[Award] Atefeh received the CUGSA travel grant to attend the 245th ECS 2024 (May 2024 in San Francisco). Congrats!!

Talks

[Posters] Irini and Chase presented their research at the 2024 Research and Project Showcase (RAPs), hosted by Clarkson University.

Members

[Spring 2024-UG students] Irini and Chase join the Seo Lab. Welcome!

Congratulations to Wafi Aziz for joining Intel Corporation, NM as a CMP intern, 2024.

Publications

[paper] Recovery and Reuse of Magnetic Silica-Coated Iron Oxide Particles for Eco-Friendly Chemical Mechanical Planarization, Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2024 Collaboration with Samsung Electronics

[paper] Structural dependency of pyridine carboxylic acid isomers in metal-organic coordination adsorption for copper corrosion inhibition, Applied Surface Science, 2024.

[paper] Development of Highly stable ceria slurry in acetic acid-ammonium acetate buffer Media for effective chemical mechanical polishing of silicon dioxide, Materials Science in Semiconductor Processing, 2024.

[paper] Synergistically enhanced LiF–rich protective layer for highly stable silicon anodes, Applied Surface Science, 2024.

[paper] Understanding and Mitigating Temperature-Induced Agglomeration in Silica-based Chemical Mechanical Planarization (CMP) Slurry Storage, Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2024 Collaboration with GlobalFoundries

[paper] Uniform Li Deposition through the Graphene-Based Ion-Flux Regulator for High-Rate Li Metal Batteries, ACS Applied Materials & Interfaces, 2024

[paper] Low-Resistance LiFePO₄ Thick Film Electrode Processed with Dry Electrode Technology for High-Energy-Density Lithium-Ion Batteries, Small Science, 2024

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2023

[Award] Wafi Aziz received the Best Student Presentation award at the International Conference on Planarization Technology (Nov 2023 in Japan). Congrats!!

[Conference] We successfully organized the 25th CAMP CMP conference in Lake-Placid, NY, 2023!

[Media Coverage] Our research was covered by Spectrum News!

[Award] Hoang Tran received the CUGSA travel grant to attend the TECHCON 2023 (Sep 2023 in Texas). Congrats!!

[Award] Hoang Tran received the Ruth Baltus / Dreyfus travel grant to attend the upcoming 243rd ECS Meeting (June 2023 in Boston). Congrats!!

[Tour] We Clarkson team visited IBM and got to see their cutting-edge semiconductor manufacturing process

Talks

[Talks] Atefeh, Onemoon, and Dr. S. Ryu presented their research at the NCCAVS CMPUG 2023 Winter Symposium, US, 2023.

[Talks] Prof. Seo gives the invited talk, “Research Paradigm Change in CMP at Clarkson University” at Korea CMPUGM, Korea, 2023.

[Talks] Prof. Seo gives the plenary talk, “Holistic Approach to Optimizing CMP for Enhanced Semiconductor Manufacturing and Sustainability” at KISM2023, Korea, 2023.

[Talks] Wafi Aziz and Tuan Nguyen presented their research at the International Conference on Planarization Technology, Kanazawa, Japan, 2023.

[Talk] Hoang Tran presents her research, “Environmentally Benign CMP Slurries Aided by Amino Acids” SRC-TECHCON 2023, Texas, 2023.

[Presentation] Prof. Seo gives a talk, “Clarkson CMP activities” at Micron Research Symposium, Syracuse NY, 2023.

[Short presentations & Posters] Proud of our students (Atefeh, Hoang, Wafi, Ravi, and Tuan) who did the short presentations at the 25th CAMP CMP conference in Lake-Placid, NY, 2023.

[Talks] Prof. Seo gives the invited talks at Sungkyunkwan University and Hanyang University, Korea, 2023.

[Poster] Atefeh presents her first professional poster “Novel Microfabricated CMP Pads with Controlled Geometries and Micro-features” at 2023 CAMP Annual Technical Meeting, Corning NY, USA 2023.

[Talk] Hoang Tran presents her first professional talk, “Environmentally Friendly Amino Acid-Based Polishing Slurry with Reduced Galvanic Corrosion at Copper/Cobalt Interface for Advanced Cu Interconnect Applications” at 243^rd ECS Meeting, Boston, 2023.

[Talk] Ravitej presents his first professional talk “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO₂ Removal Rates during Chemical Mechanical Polishing” at CMPUG Spring 2023 Symposium, Albany NY, USA 2023.

[Posters] Proud of our students (Julia, Wafi, Tuan, Ravi and Hoang) who did the poster and oral presentations at Clarkson RAPS Research and Project Showcase

[Talk] Prof. Seo gives an invited talk at The 17^th U.S.-Korea Forum on Nanotechnology:
Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing

Members

[Fall 2023-Visiting scholar] Dr. M. Lee joins the Seo Lab. Welcome!

[Fall 2023-Postdoc] Dr. SeokGyu Ryu joins the Seo Lab. Welcome!

[Fall 2023-UG students] Felix and Fatime join the Seo Lab. Welcome!

[Fall 2023-Graduate students] Murali and Onemoon join the Seo Lab. Welcome!

[Spring 2023-Graduate student] Atefeh joins the Seo Lab. Welcome!

Projects

[Project] The Seo Lab works with KCTech !

[Project] We are super excited to announce that we have received the 2nd Jeff Lawrence Innovation Fund. Thank you, FuzeHub!!

[Project] The Seo lab works with Corning again!

[Project] The Seo Lab continues to work with Nippon Shokubai !

[Project] We are super excited to work with Mosaic Microsystems through the CAMP Grad Fellowship

[Project] Micron Technology has awarded a three-year project to us to support CMP research

[Project] The Seo Lab continues to work with Ebara Corporation ! ㅤ

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2022

Talks

[Poster] Hoang presents a poster “Environmentally benign Cu Chemical Mechanical Planarization slurries aided by amino acids” at ICPT conference, Portland OR, USA 2022.

[Poster] Ravitej presents a poster “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO₂ Removal Rates during Chemical Mechanical Polishing” at ICPT conference, Portland OR, USA 2022.

[Talk] Prof. Seo gives an invited talk “Environmentally benign post-Chemical Mechanical Planarization (CMP) cleaning solutions” in Sustainable Chemistry in Electronics, 26th Annual Grreen Chemistry & Engineering Conference, USA, 2022.

[Talk] Prof. Seo gives an invited talk “Challenges and solutions for post-CMP cleaning at interconnect levels” at CAMP Annual Technical Meeting.

[Talk] Prof. Seo gives an invited talk “Challenges and solutions for post-CMP cleaning at interconnect levels” at SEMICON China 2022.

[Talk] Prof. Seo gives an invited talk “Shallow Trench Isolation Chemical Mechanical Planarization: Slurry Chemistry, Cleaning Chemistry, and Mechanisms” at SEMICON KOREA 2022.

Members

Congratulations to Sungwon Park for joining The University of Texas at Austin as a postdoc, 2022.

Congratulations to S.S.R.K. Hanup Vegi for joining Intel Corporation, OR as a CMP Engineer, 2022.

Congratulations to Arunkumar for joining GlobalFoundries, NY as a Process Engineer, 2022.

Congratulations to Tram for joining TDK Headway, CA as a Process Engineer, 2022.

[New members-UG students] Julia, Lyle, and Tristen join the Seo Lab. Welcome!

[New members-Graduate students] Tuan and Wafi join the Seo Lab. Welcome!

[New members] Sungwon and Ian join the Seo Lab. Welcome!

[New members-Visitors] Terayama, Kihong, and Sanghuk join us for summer internship. Welcome!

Projects

[Project] Our CAMP Grad fellowship with Dr. Goodarz Ahmadi has been awarded. Thank you for your support, CAMP!

[Project] We are super excited to work with SMART Pad LLC through FuzeHub 2022 Grant Award!

[Project] The Seo Lab continues to work with Nippon Shokubai !

[Project] The Semiconductor Research Corporation has awarded a three-year project to us to support CMP research

[Project] The Seo Lab continues to work with Ebara Corporation !

[Project] The Seo Lab works with Entegris !

Publicationsㅤ

[Paper] Our paper on “Hydrogenated Ceria Nanoparticles for High-Efficiency Silicate Adsorption” is published in the New Journal of Chemistry.

[Paper] Our paper on “Suppression of Dissolution Rate via Coordination Complex in Tungsten Chemical Mechanical Planarization” is published in the Applied Sciences.

[Paper] Our paper on “Perspective—Recent Advances and Thoughts on Ceria Particle Applications in Chemical Mechanical Planarizat” is published in the ECS Journal of Solid State Science and Technology. We appreciate SK Hynix for providing financial support!

[Paper] Our paper on “Measurement of the force required to move ceria particles from SiO₂ surfaces using lateral force microscopy” is published in the Journal of Materials Research. We appreciate Ebara Corporation for providing financial support!

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2021

Projects

[Project] The Seo Lab works with Ecolab !

[Project] The Seo lab works with SK Hynix !

[Project] The Seo lab continues to work with Nippon Shokubai !

Talks

[Talk] Prof. Seo gives an invited talk at the 2021 AIChE Meeting, Boston.

Wednesday, November 10, 2021

[Talk] Dr. Seo gives a talk at 24th International Symposium on CMP

Thursday, Aug 19, 2021

[Talk] Dr. Seo gives two talks at 239th ECS meeting with the 18^th IMCS

Thursday, Aug 19, 2021

[Talk] Dr. Seo gives an invited talk at Micron Technology

Monday, June 21, 2021

[Talk] Dr. Seo gives an invited talk at Hanyang University, Korea.

Wednesday, June 2, 2021

New members

[New member] Hoang and Ravitej join the Seo Lab. Welcome!

[New member] Ngoc-Tram Le joins the Seo Lab. Welcome!

[New member] Arunkumar Venkataronappa joins the Seo Lab. Welcome!

Publicationsㅤ

[Paper] Our paper on “Storage Temperature Effects on the Slurry Health Parameters and SiO2 Removal Rates during Chemical Mechanical Polishing” is published in the ECS Journal of Solid State Science and Technology. We appreciate GlobalFoundries for providing financial support!

[Book] Advances in Chemical Mechanical Planarization (CMP), 2nd edition edited by Prof. S.V. Babu , has been released.

Dr. Seo is grateful to Prof. S.V. Babu for his leadership and for giving me the opportunity to work with him on two chapters of this book.

[Paper] Our paper on “Real-Time Visualization of the Cleaning of Ceria Particles from Silicon Dioxide Films Using PVA Brush Scrubbing” is published in the ECS Journal of Solid State Science and Technology. We appreciate Ebara Corporation for providing financial support!

[Patent] Two patents are filed in Japan. We appreciate Nippon Shokubai for providing financial support!

[Paper] Dr. Seo’s first review paper has been published-A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization

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Dr. Ji-Chul Yang Vice President of Ebara Corporation visited us! [Image]

Wednesday, October 13, 2021

Congratulations to Charith Akurana Gamaralalage for successful Ph.D. thesis defense. He is is now on his way to a fulltime job with TDK Headway!

Thursday, September 30, 2021

Jihoon Seo Appointed Assistant Professor of Chemical & Biomolecular Engineering at Clarkson University

Thursday, September 9, 2021

Special Issue “Recent Advances in CMP Slurries and Post-CMP Cleaning”

(Guest Editor-Prof. Jihoon Seo & Dr. K. Lee)

24th International Symposium on Chemical-Mechanical Planarization

(Planning Committee & Speaker-Prof. Jihoon Seo)

Tuesday, August 31, 2021

Dr. Sunghoon Lee CEO of SMART Pad LLC SMART Pad (smartpadforcmp.com) visited us [Image]

Friday, August 27, 2021

Chemical Mechanical Planarization Research: Clarkson University is leading the way in CMP

Wednesday, June 30, 2021

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2020

[Project] The Seo lab works with Corning !

November 01, 2020

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2020 Research and Excellence Awardsㅤ

May 5, 2020

News

2024

[Award] Irini received the Best Poster Presentation at the 2024 Research and Project Showcase (RAPs), hosted by Clarkson University. Congrats!!

[Award] Wafi received the Dr. Lewis J. Derzansky Memorial Graduate Scholarship Award at Clarkson’s Celebration & Recognition of Excellence Weekend, 2024. Congrats!!

[Award] Atefeh received the CUGSA travel grant to attend the 245th ECS 2024 (May 2024 in San Francisco). Congrats!!

Talks

[Posters] Irini and Chase presented their research at the 2024 Research and Project Showcase (RAPs), hosted by Clarkson University.

Members

[Spring 2024-UG students] Irini and Chase join the Seo Lab. Welcome!

Congratulations to Wafi Aziz for joining Intel Corporation, NM as a CMP intern, 2024.

Publications

[paper] Recovery and Reuse of Magnetic Silica-Coated Iron Oxide Particles for Eco-Friendly Chemical Mechanical Planarization, Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2024 Collaboration with Samsung Electronics

[paper] Structural dependency of pyridine carboxylic acid isomers in metal-organic coordination adsorption for copper corrosion inhibition, Applied Surface Science, 2024.

[paper] Development of Highly stable ceria slurry in acetic acid-ammonium acetate buffer Media for effective chemical mechanical polishing of silicon dioxide, Materials Science in Semiconductor Processing, 2024.

[paper] Synergistically enhanced LiF–rich protective layer for highly stable silicon anodes, Applied Surface Science, 2024.

[paper] Understanding and Mitigating Temperature-Induced Agglomeration in Silica-based Chemical Mechanical Planarization (CMP) Slurry Storage, Colloids and Surfaces A: Physicochemical and Engineering Aspects, 2024 Collaboration with GlobalFoundries

[paper] Uniform Li Deposition through the Graphene-Based Ion-Flux Regulator for High-Rate Li Metal Batteries, ACS Applied Materials & Interfaces, 2024

[paper] Low-Resistance LiFePO4 Thick Film Electrode Processed with Dry Electrode Technology for High-Energy-Density Lithium-Ion Batteries, Small Science, 2024

2023

[Award] Wafi Aziz received the Best Student Presentation award at the International Conference on Planarization Technology (Nov 2023 in Japan). Congrats!!

[Conference] We successfully organized the 25th CAMP CMP conference in Lake-Placid, NY, 2023!

[Media Coverage] Our research was covered by Spectrum News!

[Award] Hoang Tran received the CUGSA travel grant to attend the TECHCON 2023 (Sep 2023 in Texas). Congrats!!

[Award] Hoang Tran received the Ruth Baltus / Dreyfus travel grant to attend the upcoming 243rd ECS Meeting (June 2023 in Boston). Congrats!!

[Tour] We Clarkson team visited IBM and got to see their cutting-edge semiconductor manufacturing process

Talks

[Talks] Atefeh, Onemoon, and Dr. S. Ryu presented their research at the NCCAVS CMPUG 2023 Winter Symposium, US, 2023.

[Talks] Prof. Seo gives the invited talk, “Research Paradigm Change in CMP at Clarkson University” at Korea CMPUGM, Korea, 2023.

[Talks] Prof. Seo gives the plenary talk, “Holistic Approach to Optimizing CMP for Enhanced Semiconductor Manufacturing and Sustainability” at KISM2023, Korea, 2023.

[Talks] Wafi Aziz and Tuan Nguyen presented their research at the International Conference on Planarization Technology, Kanazawa, Japan, 2023.

[Talk] Hoang Tran presents her research, “Environmentally Benign CMP Slurries Aided by Amino Acids” SRC-TECHCON 2023, Texas, 2023.

[Presentation] Prof. Seo gives a talk, “Clarkson CMP activities” at Micron Research Symposium, Syracuse NY, 2023.

[Short presentations & Posters] Proud of our students (Atefeh, Hoang, Wafi, Ravi, and Tuan) who did the short presentations at the 25th CAMP CMP conference in Lake-Placid, NY, 2023.

[Talks] Prof. Seo gives the invited talks at Sungkyunkwan University and Hanyang University, Korea, 2023.

[Poster] Atefeh presents her first professional poster “Novel Microfabricated CMP Pads with Controlled Geometries and Micro-features” at 2023 CAMP Annual Technical Meeting, Corning NY, USA 2023.

[Talk] Hoang Tran presents her first professional talk, “Environmentally Friendly Amino Acid-Based Polishing Slurry with Reduced Galvanic Corrosion at Copper/Cobalt Interface for Advanced Cu Interconnect Applications” at 243rd ECS Meeting, Boston, 2023.

[Talk] Ravitej presents his first professional talk “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO2 Removal Rates during Chemical Mechanical Polishing” at CMPUG Spring 2023 Symposium, Albany NY, USA 2023.

[Posters] Proud of our students (Julia, Wafi, Tuan, Ravi and Hoang) who did the poster and oral presentations at Clarkson RAPS Research and Project Showcase

[Talk] Prof. Seo gives an invited talk at The 17th U.S.-Korea Forum on Nanotechnology:Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing

Members

[Fall 2023-Visiting scholar] Dr. M. Lee joins the Seo Lab. Welcome!

[Fall 2023-Postdoc] Dr. SeokGyu Ryu joins the Seo Lab. Welcome!

[Fall 2023-UG students] Felix and Fatime join the Seo Lab. Welcome!

[Fall 2023-Graduate students] Murali and Onemoon join the Seo Lab. Welcome!

[Spring 2023-Graduate student] Atefeh joins the Seo Lab. Welcome!

Projects

[Project] The Seo Lab works with KCTech !

[Project] We are super excited to announce that we have received the 2nd Jeff Lawrence Innovation Fund. Thank you, FuzeHub!!

[Project] The Seo lab works with Corning again!

[Project] The Seo Lab continues to work with Nippon Shokubai !

[Project] We are super excited to work with Mosaic Microsystems through the CAMP Grad Fellowship

[Project] Micron Technology has awarded a three-year project to us to support CMP research

[Project] The Seo Lab continues to work with Ebara Corporation ! ㅤ

2022

Talks

[Poster] Hoang presents a poster “Environmentally benign Cu Chemical Mechanical Planarization slurries aided by amino acids” at ICPT conference, Portland OR, USA 2022.

[Poster] Ravitej presents a poster “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO2 Removal Rates during Chemical Mechanical Polishing” at ICPT conference, Portland OR, USA 2022.

[Talk] Prof. Seo gives an invited talk “Environmentally benign post-Chemical Mechanical Planarization (CMP) cleaning solutions” in Sustainable Chemistry in Electronics, 26th Annual Grreen Chemistry & Engineering Conference, USA, 2022.

[Talk] Prof. Seo gives an invited talk “Challenges and solutions for post-CMP cleaning at interconnect levels” at CAMP Annual Technical Meeting.

[Talk] Prof. Seo gives an invited talk “Challenges and solutions for post-CMP cleaning at interconnect levels” at SEMICON China 2022.

[Talk] Prof. Seo gives an invited talk “Shallow Trench Isolation Chemical Mechanical Planarization: Slurry Chemistry, Cleaning Chemistry, and Mechanisms” at SEMICON KOREA 2022.

Members

Congratulations to Sungwon Park for joining The University of Texas at Austin as a postdoc, 2022.

Congratulations to S.S.R.K. Hanup Vegi for joining Intel Corporation, OR as a CMP Engineer, 2022.

Congratulations to Arunkumar for joining GlobalFoundries, NY as a Process Engineer, 2022.

Congratulations to Tram for joining TDK Headway, CA as a Process Engineer, 2022.

[New members-UG students] Julia, Lyle, and Tristen join the Seo Lab. Welcome!

[New members-Graduate students] Tuan and Wafi join the Seo Lab. Welcome!

[New members] Sungwon and Ian join the Seo Lab. Welcome!

[New members-Visitors] Terayama, Kihong, and Sanghuk join us for summer internship. Welcome!

Projects

[Project] Our CAMP Grad fellowship with Dr. Goodarz Ahmadi has been awarded. Thank you for your support, CAMP!

[Project] We are super excited to work with SMART Pad LLC through FuzeHub 2022 Grant Award!

[Project] The Seo Lab continues to work with Nippon Shokubai !

[Project] The Semiconductor Research Corporation has awarded a three-year project to us to support CMP research

[Project] The Seo Lab continues to work with Ebara Corporation !

[Project] The Seo Lab works with Entegris !

Publicationsㅤ

[Paper] Our paper on “Hydrogenated Ceria Nanoparticles for High-Efficiency Silicate Adsorption” is published in the New Journal of Chemistry.

[Paper] Our paper on “Suppression of Dissolution Rate via Coordination Complex in Tungsten Chemical Mechanical Planarization” is published in the Applied Sciences.

[paper] Low-Resistance LiFePO₄ Thick Film Electrode Processed with Dry Electrode Technology for High-Energy-Density Lithium-Ion Batteries, Small Science, 2024

[Talk] Hoang Tran presents her first professional talk, “Environmentally Friendly Amino Acid-Based Polishing Slurry with Reduced Galvanic Corrosion at Copper/Cobalt Interface for Advanced Cu Interconnect Applications” at 243^rd ECS Meeting, Boston, 2023.

[Talk] Ravitej presents his first professional talk “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO₂ Removal Rates during Chemical Mechanical Polishing” at CMPUG Spring 2023 Symposium, Albany NY, USA 2023.

[Talk] Prof. Seo gives an invited talk at The 17^th U.S.-Korea Forum on Nanotechnology:
Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing

[Poster] Ravitej presents a poster “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO₂ Removal Rates during Chemical Mechanical Polishing” at ICPT conference, Portland OR, USA 2022.

[Paper] Our paper on “Measurement of the force required to move ceria particles from SiO₂ surfaces using lateral force microscopy” is published in the Journal of Materials Research. We appreciate Ebara Corporation for providing financial support!

[Talk] Dr. Seo gives two talks at 239th ECS meeting with the 18^th IMCS