{"id":8,"date":"2021-05-28T12:13:19","date_gmt":"2021-05-28T12:13:19","guid":{"rendered":"https:\/\/dev-cu-sites.pantheonsite.io\/jseo\/?page_id=8"},"modified":"2021-09-09T14:50:46","modified_gmt":"2021-09-09T14:50:46","slug":"research","status":"publish","type":"page","link":"https:\/\/sites.clarkson.edu\/jseo\/research\/","title":{"rendered":"Research"},"content":{"rendered":"\n<h2 class=\"has-large-font-size wp-block-heading\"><strong><u>Research Interests<\/u><\/strong><\/h2>\n\n\n\n<ul class=\"has-medium-font-size wp-block-list\"><li>Research and development of new CMP slurries and Post-CMP cleaning solutions for copper, tungsten, cobalt, oxide, STI, and barrier metal layers.<\/li><li>Colloidal Chemistry and Electrochemistry<\/li><li>Nanoparticle synthesis and dispersion<\/li><li>Particle adhesion and removal<\/li><li>Atomic force microscopy &amp; Evanescent Wave Microscopy<\/li><\/ul>\n\n\n\n<p><\/p>\n\n\n\n<div class=\"wp-block-columns is-layout-flex wp-container-core-columns-is-layout-9d6595d7 wp-block-columns-is-layout-flex\">\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h2 class=\"has-text-align-center wp-block-heading\"><strong>Chemical Mechanical Planarization, CMP process<\/strong><\/h2>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"CMP\" width=\"640\" height=\"360\" src=\"https:\/\/www.youtube.com\/embed\/rr0fvJL_BqM?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n<\/div>\n\n\n\n<div class=\"wp-block-column is-layout-flow wp-block-column-is-layout-flow\">\n<h2 class=\"has-text-align-center wp-block-heading\"><strong>Working at Our Lab<\/strong><\/h2>\n\n\n\n<p><\/p>\n\n\n\n<figure class=\"wp-block-embed is-type-video is-provider-youtube wp-block-embed-youtube wp-embed-aspect-16-9 wp-has-aspect-ratio\"><div class=\"wp-block-embed__wrapper\">\n<iframe loading=\"lazy\" title=\"Tool\" width=\"640\" height=\"360\" src=\"https:\/\/www.youtube.com\/embed\/dx4dWoQrm1A?feature=oembed\" frameborder=\"0\" allow=\"accelerometer; autoplay; clipboard-write; encrypted-media; gyroscope; picture-in-picture; web-share\" referrerpolicy=\"strict-origin-when-cross-origin\" allowfullscreen><\/iframe>\n<\/div><\/figure>\n<\/div>\n<\/div>\n\n\n\n<h2 class=\"has-large-font-size wp-block-heading\"><strong><u>Chemical Mechanical Planarization<\/u><\/strong><\/h2>\n\n\n\n<figure class=\"wp-block-image size-full is-style-default\"><img loading=\"lazy\" decoding=\"async\" width=\"1206\" height=\"1037\" src=\"https:\/\/sites.clarkson.edu\/jseo\/wp-content\/uploads\/sites\/55\/2021\/06\/CMP-1.png\" alt=\"\" class=\"wp-image-368\" srcset=\"https:\/\/sites.clarkson.edu\/jseo\/wp-content\/uploads\/sites\/55\/2021\/06\/CMP-1.png 1206w, https:\/\/sites.clarkson.edu\/jseo\/wp-content\/uploads\/sites\/55\/2021\/06\/CMP-1-300x258.png 300w, https:\/\/sites.clarkson.edu\/jseo\/wp-content\/uploads\/sites\/55\/2021\/06\/CMP-1-1024x881.png 1024w, https:\/\/sites.clarkson.edu\/jseo\/wp-content\/uploads\/sites\/55\/2021\/06\/CMP-1-768x660.png 768w, https:\/\/sites.clarkson.edu\/jseo\/wp-content\/uploads\/sites\/55\/2021\/06\/CMP-1-314x270.png 314w\" sizes=\"auto, (max-width: 1206px) 100vw, 1206px\" \/><\/figure>\n","protected":false},"excerpt":{"rendered":"<p>Research Interests Research and development of new CMP slurries and Post-CMP cleaning solutions for copper, tungsten, cobalt, oxide, STI, and barrier metal layers. Colloidal Chemistry and Electrochemistry Nanoparticle synthesis and dispersion Particle adhesion and removal Atomic force microscopy &amp; Evanescent Wave Microscopy Chemical Mechanical Planarization, CMP process Working at Our Lab Chemical Mechanical Planarization<\/p>\n","protected":false},"author":149,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"advgb_blocks_editor_width":"","advgb_blocks_columns_visual_guide":"","footnotes":""},"class_list":["post-8","page","type-page","status-publish","hentry"],"coauthors":[],"author_meta":{"author_link":"https:\/\/sites.clarkson.edu\/jseo\/author\/jseo\/","display_name":"jseo"},"relative_dates":{"created":"Posted 5 years ago","modified":"Updated 5 years ago"},"absolute_dates":{"created":"Posted on May 28, 2021","modified":"Updated on September 9, 2021"},"absolute_dates_time":{"created":"Posted on May 28, 2021 12:13 pm","modified":"Updated on September 9, 2021 2:50 pm"},"featured_img_caption":"","featured_img":false,"series_order":"","_links":{"self":[{"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/pages\/8","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/users\/149"}],"replies":[{"embeddable":true,"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/comments?post=8"}],"version-history":[{"count":0,"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/pages\/8\/revisions"}],"wp:attachment":[{"href":"https:\/\/sites.clarkson.edu\/jseo\/wp-json\/wp\/v2\/media?parent=8"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}