{"id":443,"date":"2021-09-09T15:06:16","date_gmt":"2021-09-09T15:06:16","guid":{"rendered":"https:\/\/dev-cu-sites.pantheonsite.io\/jseo\/?page_id=443"},"modified":"2025-05-09T15:58:39","modified_gmt":"2025-05-09T15:58:39","slug":"news","status":"publish","type":"page","link":"https:\/\/sites.clarkson.edu\/jseo\/news\/","title":{"rendered":"News"},"content":{"rendered":"\n

2025<\/h2>\n\n\n\n

[Award] Ravi and Murali received\u00a0the ECS travel grant to attend the 247th ECS meeting (May 2025 in Montreal, Canada). Congrats!!<\/p>\n\n\n\n

[Award] Ravi received\u00a0the Best Poster Award at the Joint Technical Conference of the CNY AWMA & AIHA, NY, March 2025. Congrats!!<\/p>\n\n\n\n

Talks<\/h2>\n\n\n\n

[Poster] Ravi presented his sustainable CMP research at the 27th Annual Joint Technical Conference of the CNY AWMA & AIHA, Skaneateles, NY, March 25, 2025.<\/p>\n\n\n\n

[Talks & Posters] Seokgyu, Ravi, Murali, and Prabhu presented their research at the CMPUG Presentation at Lewis University, Romeoville, IL.<\/p>\n\n\n\n

Members<\/h2>\n\n\n\n

[Spring 2025-UG students] Maxwell and Aiden join the Seo Lab. Welcome!<\/p>\n\n\n\n

[Summer 2025-UG students] Nathaniel, David, and Evan join the Seo Lab. Welcome!<\/p>\n\n\n\n

Publications<\/h2>\n\n\n\n

[paper] Green Chemistry in CMP Through a Comparison of Amino Acid Degradability and Environmental Impact with Benzotriazole in Advanced Oxidation Processes<\/a> – Journal of Environmental Chemical Engineering,\u00a02025, Collaboration with Semiconductor Research Corporation<\/strong><\/p>\n\n\n\n

[paper] Revisiting the Roles of Chelator, Inhibitor, Oxidant, and Abrasive in High-Rate Copper CMP<\/a> – ECS Journal of Solid State Science and Technology,\u00a02025, Collaboration with Prof. Sitaraman Krishnan<\/strong><\/p>\n\n\n\n

[paper] Direct Observation of Sub-100 nm Silica Particle Detachment: Lateral Force and Evanescent Microscope study<\/a>,\u00a0ECS Journal of Solid State Science and Technology,\u00a02025, Collaboration with Ebara Corporation<\/strong><\/p>\n\n\n\n

[paper] Molecular Interactions of Amino Acids for Corrosion Control in Molybdenum CMP Through Bridging Experimental Insights and DFT Simulations<\/a>,\u00a0Applied Surface Science<\/em>,\u00a02025, Collaboration with Intel and EMD<\/strong><\/p>\n\n\n\n

[paper] Role of Amino Acid-Based Inhibitors in the Dynamic Electrochemical Behavior of Cu and Co during Chemical Mechanical Planarization<\/a>,\u00a0Surfaces and Interfaces<\/em>,\u00a02025, Collaboration with Intel and EMD<\/strong><\/strong><\/p>\n\n\n\n

[paper] Boosting Selenium Cathode Performance through Kinetic Optimization<\/a>,\u00a0Journal of Power Sources<\/em>,\u00a02025, Collaboration with Kyungpook National University<\/strong><\/strong><\/p>\n\n\n\n

2024<\/h2>\n\n\n\n

[Award] Hoang received the CUGSA travel grant to attend the Techcon conf (Sep 2024 in TX), hosted by Semiconductor Research Corporation. Congrats!!<\/p>\n\n\n\n

[Conference] We successfully organized the 26th CAMP CMP conference<\/a> in Lake-Placid, NY, 2023!<\/p>\n\n\n\n

[Award] Hoang received the Sustainability Prize at the Summer Research and Project Showcase (RAPs), hosted by Clarkson University. Congrats!!<\/p>\n\n\n\n

[Award] Atefeh received the prestigious First Presentation Award<\/a> at the 245th ECS meeting. Congrats!!<\/p>\n\n\n\n

[Award] Irini received the Best Poster Presentation at the 2024 Research and Project Showcase (RAPs), hosted by Clarkson University. Congrats!!<\/p>\n\n\n\n

[Award] Wafi received the Dr. Lewis J. Derzansky Memorial Graduate Scholarship Award at Clarkson\u2019s Celebration & Recognition of Excellence Weekend, 2024. Congrats!!<\/p>\n\n\n\n

[Award] Atefeh received the CUGSA travel grant to attend the 245th ECS 2024<\/a> (May 2024 in San Francisco). Congrats!!<\/p>\n\n\n\n

Talks<\/h2>\n\n\n\n

[Short presentations & Posters] Proud of our students (Ravi, Hoang, Atefeh, Murali, Irini, and Chase) who did the short presentations at the 26th CAMP CMP conference<\/a> in Lake-Placid, NY, 2024.<\/p>\n\n\n\n

[Talk] Seokgyu presented his Mo CMP research at the 26th CAMP CMP conference<\/a> in Lake-Placid, NY, 2024.<\/p>\n\n\n\n

[Talk] Prof. Seo gives the invited talk at Hangyang University and Kyonggi University, Korea.<\/p>\n\n\n\n

[Poster] Hoang presented her sustainable CMP research at the summer RAPS at Clarkson and SRC annual meeting in AZ.<\/p>\n\n\n\n

[Talk] Prof. Seo gives the invited talk “Bridging Technology and Environment: Sustainable Approaches in CMP” at the 245th ECS 2024 in CA.<\/p>\n\n\n\n

[Talk] Atefeh presented her research (one talk and one poster) at the 245th ECS 2024 in CA.<\/p>\n\n\n\n

[Talk] Dr. S. Ryu presented his research at the CAMP technical meeting in NY. <\/p>\n\n\n\n

[Posters] Murali, Charmy, Atefeh, and Tuan presented their research at the CAMP technical meeting in NY. <\/p>\n\n\n\n

[Talk] Hoang presented her research at the NCCAVS CMPUG 2024 Spring Symposium in Texas. <\/p>\n\n\n\n

[Posters] Irini and Chase presented their research at the 2024 Research and Project Showcase (RAPs), hosted by Clarkson University. <\/p>\n\n\n\n

Members<\/h2>\n\n\n\n

Congratulations to Hoang Tran (PhD, 2024) for joining Micron Technology<\/a>, ID as a CMP process engineer, in 2024.<\/p>\n\n\n\n

[Fall 2024] Dr. Huy Le and Prabhu join the Seo Lab. Welcome!<\/p>\n\n\n\n

[Fall 2024-UG students] Ro and Tyrese join the Seo Lab. Welcome!<\/p>\n\n\n\n

[Summer 2024] Seunghwan and Jongyong join the Seo Lab as summer interns. Welcome!<\/p>\n\n\n\n

Congratulations to Wafi Aziz (MS, 2024) for joining Intel Corporation<\/a>, NM as a CMP process engineer, in 2024.<\/p>\n\n\n\n

[Spring 2024-UG students] Irini and Chase join the Seo Lab. Welcome!<\/p>\n\n\n\n

Publications<\/h2>\n\n\n\n

[paper] Enhancing CMP Performance through Micro-Structured Pad Patterns: Insights from CFD Simulations and Experimental Evaluations<\/a> – ECS Journal of Solid State Science and Technology,\u00a02024, Collaboration with KITECH<\/strong><\/p>\n\n\n\n

[paper] Tailored electrostatic attraction force between anionic polymer and Si3N4 film in consecutive gate poly open CMP<\/a> – Materials Science in Semiconductor Processing,\u00a02024, Collaboration with Samsung Electronics<\/strong><\/p>\n\n\n\n

[paper] Systematic root cause analysis of ceria-induced defects during chemical mechanical planarization and cleaning<\/a>,\u00a0Journal of Manufacturing Processes<\/em>,\u00a02024, Collaboration with Ebara Corporation<\/strong><\/p>\n\n\n\n

[paper] Environmental Impact Assessment of Chemical Mechanical Planarization Consumables: Challenges, Future Needs, and Perspectives<\/a>,\u00a0ACS Sustainable Chemistry & Engineering<\/em>,\u00a02024, Collaboration with Micron Technology<\/strong><\/p>\n\n\n\n

[paper] Examining Amino Acids as Environmentally Friendly Corrosion Inhibitors for Cu and Co Chemical Mechanical Planarization<\/a>,\u00a0Journal of Environmental Chemical Engineering<\/em>,\u00a02024, Collaboration with Semiconductor Research Corporation<\/strong><\/p>\n\n\n\n

[paper] Two decades of ceria nanoparticles research: structure, properties and emerging applications<\/a>, Materials Horizons<\/em>, 2024 Collaboration with Prof. Silvana Andreescu<\/p>\n\n\n\n

[paper] Recovery and Reuse of Magnetic Silica-Coated Iron Oxide Particles for Eco-Friendly Chemical Mechanical Planarization<\/a>, Colloids and Surfaces A: Physicochemical and Engineering Aspects<\/em>, 2024 Collaboration with Samsung Electronics<\/strong><\/p>\n\n\n\n

[paper] Enhancing dispersion stability and recyclability of ceria slurry with polyacrylic acid for improved glass polishing performance<\/a>, Journal of Industrial and Engineering Chemistry, 2024 Collaboration with Corning<\/strong>.<\/p>\n\n\n\n

[paper] Structural dependency of pyridine carboxylic acid isomers in metal-organic coordination adsorption for copper corrosion inhibition<\/a>, Applied Surface Science, 2024.<\/p>\n\n\n\n

[paper] Directing the uniform and dense Li deposition via graphene-enhanced separators for high-stability Li metal batteries<\/a>, Electrochimica Aata, 2024.<\/p>\n\n\n\n

[paper] Development of Highly stable ceria slurry in acetic acid-ammonium acetate buffer Media for effective chemical mechanical polishing of silicon dioxide<\/a>, Materials Science in Semiconductor Processing, 2024.<\/p>\n\n\n\n

[paper] Synergistically enhanced LiF\u2013rich protective layer for highly stable silicon anodes<\/a>, Applied Surface Science, 2024.<\/p>\n\n\n\n

[paper] Understanding and Mitigating Temperature-Induced Agglomeration in Silica-based Chemical Mechanical Planarization (CMP) Slurry Storage<\/a>, Colloids and Surfaces A: Physicochemical and Engineering Aspects<\/em>, 2024 Collaboration with GlobalFoundries<\/p>\n\n\n\n

[paper] Uniform Li Deposition through the Graphene-Based Ion-Flux Regulator for High-Rate Li Metal Batteries<\/a>, ACS Applied Materials & Interfaces, 2024<\/p>\n\n\n\n

[paper] Low-Resistance LiFePO4<\/sub> Thick Film Electrode Processed with Dry Electrode Technology for High-Energy-Density Lithium-Ion Batteries<\/a>, Small Science, 2024<\/p>\n\n\n\n

\u3164<\/p>\n\n\n\n

2023<\/h2>\n\n\n\n

[Award] Wafi Aziz received the Best Student Presentation award at the International Conference on Planarization Technology<\/a> (Nov 2023 in Japan). Congrats!!<\/p>\n\n\n\n

[Conference] We successfully organized the 25th CAMP CMP conference<\/a> in Lake-Placid, NY, 2023!<\/p>\n\n\n\n

[Media Coverage] Our research was covered by Spectrum News!<\/p>\n\n\n\n

[Award] Hoang Tran received the CUGSA travel grant to attend the TECHCON 2023<\/a> (Sep 2023 in Texas). Congrats!!<\/p>\n\n\n\n

[Award] Hoang Tran received the Ruth Baltus \/ Dreyfus travel grant to attend the upcoming 243rd ECS Meeting <\/strong>(June 2023 in Boston). Congrats!!<\/p>\n\n\n\n

[Tour] We Clarkson team visited IBM<\/a> and got to see their cutting-edge semiconductor manufacturing process<\/p>\n\n\n\n

Talks<\/h3>\n\n\n\n

[Talks] Atefeh, Onemoon, and Dr. S. Ryu presented their research at the NCCAVS CMPUG 2023 Winter Symposium<\/a>, US, 2023. <\/p>\n\n\n\n

[Talks] Prof. Seo gives the invited talk, “Research Paradigm Change in CMP at Clarkson University” at Korea CMPUGM<\/a>, Korea, 2023.<\/p>\n\n\n\n

[Talks] Prof. Seo gives the plenary talk, “Holistic Approach to Optimizing CMP for Enhanced Semiconductor Manufacturing and Sustainability” at KISM2023<\/a>, Korea, 2023.<\/p>\n\n\n\n

[Talks] Wafi Aziz and Tuan Nguyen presented their research at the International Conference on Planarization Technology<\/a>, Kanazawa, Japan, 2023. <\/p>\n\n\n\n

[Talk] Hoang Tran presents her research, “Environmentally Benign CMP Slurries Aided by Amino Acids” SRC-TECHCON 2023<\/a>, Texas, 2023.<\/p>\n\n\n\n

[Presentation] Prof. Seo gives a talk, “Clarkson CMP activities” at Micron Research Symposium, Syracuse NY, 2023.<\/p>\n\n\n\n

[Short presentations & Posters] Proud of our students (Atefeh, Hoang, Wafi, Ravi, and Tuan) who did the short presentations at the 25th CAMP CMP conference<\/a> in Lake-Placid, NY, 2023.<\/p>\n\n\n\n

[Talks] Prof. Seo gives the invited talks at Sungkyunkwan University<\/a> and Hanyang University<\/a>, Korea, 2023.<\/p>\n\n\n\n

[Poster] Atefeh presents her first professional poster “Novel Microfabricated CMP Pads with Controlled Geometries and Micro-features” at 2023 CAMP Annual Technical Meeting<\/a>, Corning NY, USA 2023.<\/p>\n\n\n\n

[Talk] Hoang Tran presents her first professional talk, “Environmentally Friendly Amino Acid-Based Polishing Slurry with Reduced Galvanic Corrosion at Copper\/Cobalt Interface for Advanced Cu Interconnect Applications” at 243rd<\/sup> ECS Meeting, Boston<\/a>, 2023. <\/p>\n\n\n\n

[Talk] Ravitej presents his first professional talk “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO2<\/sub> Removal Rates during Chemical Mechanical Polishing” at CMPUG Spring 2023 Symposium<\/a>, Albany NY, USA 2023.<\/p>\n\n\n\n

[Posters] Proud of our students (Julia, Wafi, Tuan, Ravi and Hoang) who did the poster and oral presentations at Clarkson RAPS Research and Project Showcase<\/a><\/p>\n\n\n\n

[Talk] Prof. Seo gives an invited talk at The 17th<\/sup> U.S.-Korea Forum on Nanotechnology:
Next-Generation Semiconductors and the Environmental Implications of Semiconductor Manufacturing<\/a> <\/p>\n\n\n\n

Members<\/h3>\n\n\n\n

[Fall 2023-Visiting scholar] Dr. M. Lee joins the Seo Lab. Welcome!<\/p>\n\n\n\n

[Fall 2023-Postdoc] Dr. SeokGyu Ryu joins the Seo Lab. Welcome!<\/p>\n\n\n\n

[Fall 2023-UG students] Felix and Fatime join the Seo Lab. Welcome!<\/p>\n\n\n\n

[Fall 2023-Graduate students] Murali and Onemoon join the Seo Lab. Welcome!<\/p>\n\n\n\n

[Spring 2023-Graduate student] Atefeh joins the Seo Lab. Welcome!<\/p>\n\n\n\n

Projects<\/h3>\n\n\n\n

[Project] The Seo Lab works with KCTech<\/a>!<\/p>\n\n\n\n

[Project] We are super excited to announce that we have received the 2nd Jeff Lawrence Innovation Fund. Thank you, FuzeHub<\/a>!!<\/p>\n\n\n\n

[Project] The Seo lab works with Corning<\/a> again!<\/p>\n\n\n\n

[Project] The Seo Lab continues to work with <\/strong>Nippon Shokubai<\/a>!<\/p>\n\n\n\n

[Project] We are super excited to work with Mosaic Microsystems<\/a> through the CAMP Grad Fellowship<\/a><\/p>\n\n\n\n

[Project] Micron Technology<\/a> has awarded a three-year project to us to support CMP research<\/p>\n\n\n\n

[Project] The Seo Lab continues to work with Ebara Corporation<\/a>!<\/p>\n\n\n\n

2022<\/h2>\n\n\n\n

Talks<\/h2>\n\n\n\n

[Poster] Hoang presents a poster “Environmentally benign Cu Chemical Mechanical Planarization slurries aided by amino acids” at ICPT conference<\/a>, Portland OR, USA 2022.<\/p>\n\n\n\n

[Poster] Ravitej presents a poster “Towards Understanding Smaller Ceria Particles (<10 nm) for SiO2<\/sub> Removal Rates during Chemical Mechanical Polishing” at ICPT conference<\/a>, Portland OR, USA 2022.<\/p>\n\n\n\n

[Talk] Prof. Seo gives an invited talk “Environmentally benign post-Chemical Mechanical Planarization (CMP) cleaning solutions” in Sustainable Chemistry in Electronics, 26th Annual Grreen Chemistry & Engineering Conference,<\/a> USA, 2022.<\/p>\n\n\n\n

[Talk] Prof. Seo gives an invited talk “Challenges and solutions for post-CMP cleaning at interconnect levels” at <\/strong>CAMP Annual Technical Meeting<\/a>.<\/p>\n\n\n\n

[Talk] Prof. Seo gives an invited talk “Challenges and solutions for post-CMP cleaning at interconnect levels” at <\/strong>SEMICON China 2022<\/a>.<\/p>\n\n\n\n

[Talk] Prof. Seo gives an invited talk “Shallow Trench Isolation Chemical Mechanical Planarization: Slurry Chemistry, Cleaning Chemistry, and Mechanisms” at <\/strong>SEMICON KOREA 2022<\/a>.<\/p>\n\n\n\n

Members<\/h2>\n\n\n\n

Congratulations to Sungwon Park for joining The University of Texas at Austin<\/a> as a postdoc, 2022.<\/p>\n\n\n\n

Congratulations to S.S.R.K. Hanup Vegi for joining Intel Corporation<\/a>, OR as a CMP Engineer, 2022.<\/p>\n\n\n\n

Congratulations to Arunkumar for joining GlobalFoundries<\/a>, NY as a Process Engineer, 2022. <\/p>\n\n\n\n

Congratulations to Tram for joining TDK Headway<\/a>, CA as a Process Engineer, 2022.<\/p>\n\n\n\n

[New members-UG students] Julia, Lyle, and Tristen join the Seo Lab. Welcome!<\/p>\n\n\n\n

[New members-Graduate students] Tuan and Wafi join the Seo Lab. Welcome!<\/p>\n\n\n\n

[New members] Sungwon and Ian join the Seo Lab. Welcome!<\/p>\n\n\n\n

[New members-Visitors] Terayama, Kihong, and Sanghuk join us for summer internship. Welcome!<\/p>\n\n\n\n

Projects<\/h3>\n\n\n\n

[Project] Our CAMP Grad fellowship with Dr. Goodarz Ahmadi has been awarded. Thank you for your support, CAMP<\/a>!<\/p>\n\n\n\n

[Project] We are super excited to work with SMART Pad LLC<\/a> through FuzeHub 2022 Grant Award!<\/a><\/p>\n\n\n\n

[Project] The Seo Lab continues to work with <\/strong>Nippon Shokubai<\/a>!<\/p>\n\n\n\n

[Project] <\/strong>The Semiconductor Research Corporation<\/a> has awarded a three-year project to us to support CMP research<\/p>\n\n\n\n

[Project] The Seo Lab continues to work with Ebara Corporation<\/a><\/p>\n\n\n\n

[Project] The Seo Lab works with Entegris<\/a>! <\/strong><\/p>\n\n\n\n

Publications<\/h3>\n\n\n\n

[Paper] Our paper on “Hydrogenated Ceria Nanoparticles for High-Efficiency Silicate Adsorption<\/a>” is published in the New Journal of Chemistry.<\/p>\n\n\n\n

[Paper] Our paper on “Suppression of Dissolution Rate via Coordination Complex in Tungsten Chemical Mechanical Planarization<\/a>” is published in the Applied Sciences.<\/p>\n\n\n\n

[Paper] Our paper on \u201cPerspective\u2014Recent Advances and Thoughts on Ceria Particle Applications in Chemical Mechanical Planarizat<\/a>\u201d is published in the ECS Journal of Solid State Science and Technology. We appreciate <\/a>SK Hynix<\/a> for providing financial support!<\/p>\n\n\n\n

[Paper] Our paper on \u201cMeasurement of the force required to move ceria particles from SiO2<\/sub> surfaces using lateral force microscopy<\/a>\u201d is published in the Journal of Materials Research. We appreciate <\/a>Ebara Corporation<\/a> for providing financial support!<\/p>\n\n\n\n

2021<\/h2>\n\n\n\n

Projects<\/h3>\n\n\n\n

[Project] The Seo Lab works with Ecolab<\/a> !<\/p>\n\n\n\n

[Project] The Seo lab works with SK Hynix<\/a> !<\/p>\n\n\n\n

[Project] The Seo lab continues to work with Nippon Shokubai<\/a>!<\/p>\n\n\n\n

Talks<\/h3>\n\n\n\n

[Talk] Prof. Seo gives an invited talk<\/span> at the 2021 AIChE Meeting<\/a>, Boston.
Wednesday, November 10, 2021<\/strong><\/p>\n\n\n\n

[Talk] Dr. Seo gives a talk<\/span> at 24th International Symposium on CMP<\/em><\/a>
Thursday, Aug 19, 2021<\/strong><\/p>\n\n\n\n

[Talk] Dr. Seo gives two talks<\/span> at 239th ECS meeting with the 18th<\/sup> IMCS<\/em><\/a>
Thursday, Aug 19, 2021<\/strong><\/p>\n\n\n\n

[Talk] Dr. Seo gives an invited talk<\/span> at Micron Technology<\/a>
Monday, June 21, 2021<\/strong><\/p>\n\n\n\n

[Talk] Dr. Seo gives an invited talk<\/span> at Hanyang University<\/a>, Korea.
Wednesday<\/strong>, June 2, 2021<\/strong><\/p>\n\n\n\n

New members<\/h3>\n\n\n\n

[New member] Hoang and Ravitej join the Seo Lab. Welcome!<\/p>\n\n\n\n

[New member] Ngoc-Tram Le joins the Seo Lab. Welcome!<\/p>\n\n\n\n

[New member] Arunkumar Venkataronappa joins the Seo Lab. Welcome!<\/p>\n\n\n\n

Publications\u3164 <\/h3>\n\n\n\n

[Paper] Our paper on “Storage Temperature Effects on the Slurry Health Parameters and SiO2 Removal Rates during Chemical Mechanical Polishing<\/a>” is published in the ECS Journal of Solid State Science and Technology. We appreciate GlobalFoundries<\/a> for providing financial support!<\/p>\n\n\n\n

[Book] Advances in Chemical Mechanical Planarization (CMP), 2nd edition<\/a> edited by Prof. S.V. Babu , has been released.<\/p>\n\n\n\n