{"id":1058,"date":"2024-12-16T14:05:41","date_gmt":"2024-12-16T14:05:41","guid":{"rendered":"https:\/\/sites.clarkson.edu\/camp\/?page_id=1058"},"modified":"2025-08-15T15:54:20","modified_gmt":"2025-08-15T15:54:20","slug":"2025-camp-cmp-symposium","status":"publish","type":"page","link":"https:\/\/sites.clarkson.edu\/camp\/2025-camp-cmp-symposium\/","title":{"rendered":"2025 CAMP CMP Symposium"},"content":{"rendered":"\n

CAMP and the NCCAVS CMP Users Group are excited to co-host the 27th International Symposium on Chemical-Mechanical Planarization (CMP)!<\/h2>\n\n\n\n
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The meeting will be held July 27 – 30, 2025<\/strong>, in Saratoga Springs, NY. Saratoga Springs is a beautiful upstate NY town only 45 mins drive from Albany International airport. <\/p>\n\n\n\n

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Chemical-mechanical planarization (CMP) <\/strong>has come to occupy a central role in many industrially important technologies, especially in semiconductor manufacturing. The 27th International Symposium on CMP<\/em><\/strong>, hosted by Clarkson University\u2019s Center for Advanced Materials Processing (CAMP)<\/strong> in conjunction with the US CMP Users Group, is the leading forum to hear leading-edge ideas and technologies relating to CMP along with ample time to network with colleagues in the CMP field.<\/p>\n\n\n\n

** Presentation Schedule, Abstracts, & Approved PPT slides Now Available<\/strong><\/mark> **<\/h3>\n\n\n\n

NEW (August 14):<\/strong><\/mark> PDF file containing presentation PPT files (from presenters who approved distribution) can be found here<\/a>.<\/mark><\/strong><\/p>\n\n\n\n

The symposium booklet (with abstracts) can be found here<\/a>.<\/p>\n\n\n\n

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Keynote Speaker<\/h2>\n\n\n\n
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Mark Dougherty<\/h4>\n\n\n\n

President & General Manager, Tokyo Electron America, and TEL Manufacturing & Engineerings of America, members of the Tokyo Electron Limited (TEL) group of companies.<\/p>\n\n\n\n

Mark is responsible for all TEL U.S. customer sales and service support, as well as U.S.-based semiconductor process equipment development and manufacturing. Prior to joining TEL in April 2020, he was Vice President of Module Engineering and Manufacturing Operations at GlobalFoundries Fab 8, where he led a tenfold increase in manufacturing capacity, ramping production volume and yield to world-class levels. Mark spent over 20 years in IBM\u2019s semiconductor unit, working as a process and integration engineer before assuming progressively larger management responsibilities in module engineering, process control, manufacturing operations, and unit process development.<\/p>\n<\/div>\n\n\n\n

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Plenary Speakers<\/h2>\n\n\n\n
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Dr. Bahar Basim<\/h4>\n\n\n\n

Engineering Manager (Planar and DE Productivity) & Program Lead, Intel Corp.<\/p>\n\n\n\n

With over two decades of experience in microelectronics research and development, integration, and yield enhancement, Dr. Basim is a recognized expert in her field. She has held significant roles at Intel Corporation and Texas Instruments and multiple academic appointments. At Intel Corporation, Dr. Basim worked on 3-D NAND development with the Non-Volatile Memory Scaling and Architecture Group. She is currently part of the Logic Technology Development Productivity and Selection Team, focusing on first-of-a-kind equipment, materials cost, and new technology introduction.<\/p>\n<\/div>\n\n\n\n

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Dr. Paul Bernatis<\/h4>\n\n\n\n
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Fellow, DuPont Advanced Cleans & Slurry Technologies<\/p>\n\n\n\n

With considerable experience in nanoparticles and surfaces gained from decades of working in the semiconductor and pharmaceutical industries, Dr. Bernatis is a leader in developing formulations used for cleaning applications. His work at DuPont requires the development of selective chemistries to remove tenacious residues from delicate structures. Most recently, his focus has been on developing new formulations for post-CMP cleaning of cutting-edge devices with sub-10 nm geometries that contain corrosion-sensitive metals.<\/p>\n<\/div>\n\n\n\n

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Registration & Hotel Information:<\/h4>\n\n\n\n

Symposium site:<\/strong> <\/p>\n\n\n\n

Gideon Putnam Hotel, Saratoga Springs, NY.<\/p>\n\n\n\n

Registration is Closed!<\/mark><\/strong><\/p>\n\n\n\n

Registration rates listed below include symposium attendance, breakfasts and lunches (Monday-Wednesday), receptions on Sunday and Monday, and the symposium dinner (on Monday, July 28). Hotel rooms are to be paid separately. <\/p>\n\n\n\n

Full Registration: <\/em>$900
Speaker<\/em> Registration:<\/em> $650
ClarksonU Faculty\/Staff Registration:<\/em> $650
Student Registration: <\/em>$250<\/p>\n\n\n\n

Registration closed July 14, 2025 (11:59pm U.S. EST).<\/p>\n\n\n\n

The registration refund policy is at the bottom of the page. <\/p>\n\n\n\n

Hotel accommodation details:<\/strong><\/p>\n\n\n\n

Gideon Putnam Resort Check-In Time: 4 pm<\/p>\n\n\n\n

Gideon Putnam Resort Check-Out Time: 11am<\/p>\n\n\n\n

Block reservations at the Gideon Putnam are no longer available, but you may still contact the Gideon Putnam<\/strong><\/a> directly to check if rooms are available. The same applies to the second hotel, Home2 Suites by Hilton<\/a><\/strong>, in nearby Malta, NY (approx. 7 miles from the Gideon).<\/p>\n\n\n\n

There are many other hotels in Saratoga Springs<\/a> to consider. Please note, however, these may be 1-2 miles from the Gideon Putnam Hotel, so you will need to plan for travel to\/from the Gideon Putnam.<\/p>\n<\/div>\n\n\n\n

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About Saratoga Springs: <\/h4>\n\n\n\n

Saratoga Springs is in picturesque upstate New York and has a lot of things to see and do. The Adirondack Mountains are only a short drive away and Saratoga Springs is internationally known for its horse racing. <\/p>\n\n\n\n

Check out more about Saratoga Springs here<\/a>.<\/p>\n\n\n\n

Please reach out to Leila Boyea<\/strong><\/em> at the CAMP office (lboyea@clarkson.edu<\/a>), CAMP Director Devon Shipp<\/strong><\/em> (dshipp@clarkson.edu<\/a>), or CAMP Business Development Director Eric Xu <\/strong><\/em>(ericxu@clarkson.edu<\/a>) if you have questions.<\/p>\n\n\n\n

Eating & Entertainment in the Saratoga Springs area<\/h5>\n\n\n\n

Saratoga Springs has a lot to see and do! <\/p>\n\n\n\n

Check out www.discoversaratoga.org<\/a> for specific info, but consider diving into Saratoga’s history (e.g., Revolutionary War Monument), horse racing (e.g., National Museum of Racing and Hall of Fame), beautiful parks (e.g., Saratoga Spa State Park), and golf courses. Much more can be found at the Discover Saratoga website<\/a>. <\/p>\n\n\n\n

Below are some local restaurants (with phone numbers and opening days during our symposium), but there are many others. <\/p>\n\n\n\n