{"id":1033,"date":"2024-10-10T17:26:56","date_gmt":"2024-10-10T17:26:56","guid":{"rendered":"https:\/\/sites.clarkson.edu\/camp\/?page_id=1033"},"modified":"2024-10-10T17:26:56","modified_gmt":"2024-10-10T17:26:56","slug":"cmp-symposium","status":"publish","type":"page","link":"https:\/\/sites.clarkson.edu\/camp\/cmp-symposium\/","title":{"rendered":"2021 CAMP CMP Symposium"},"content":{"rendered":"\n<p>larkson University&#8217;s Center for Advanced Materials Processing (CAMP) and the NCCAVS CMP Users Group invites you to attend the <em><strong>24th International Symposium on Chemical-Mechanical Planarization<\/strong><\/em>.<\/p>\n\n\n\n<p><\/p>\n\n\n\n<h2 class=\"wp-block-heading\">24th International Symposium on Chemical-Mechanical Planarization\u200b<\/h2>\n\n\n\n<p><strong>Monday, August 16 &#8211; Thursday, August 19, 2021<br><\/strong>The meeting will be held online<\/p>\n\n\n\n<p><em>Talks to begin 8am US Pacific Time each day<\/em><\/p>\n\n\n\n<p><a role=\"button\" href=\"https:\/\/connect.clarkson.edu\/register\/CAMP2021\"><br>Click Here to Register<\/a><a role=\"button\" href=\"https:\/\/drive.google.com\/file\/d\/11nwDW8a5vYLPgPw-6nasKFoVzzdTVI8Z\/view?usp=sharing\"><br>Click here to download Symposium Booklet (Agenda and Abstracts)<\/a><\/p>\n\n\n\n<p>Registration Fees:<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li>University\/Invited Speaker ($100)<\/li>\n\n\n\n<li>Non-University ($180)<\/li>\n\n\n\n<li>Student ($40)<\/li>\n<\/ul>\n\n\n\n<h2 class=\"wp-block-heading\">Symposium Schedule Now Available!<\/h2>\n\n\n\n<p><strong>Chemical-mechanical planarization (CMP)&nbsp;<\/strong>has come to occupy a central role in many industrially important technologies. This year due to the pandemic, the symposium will be held in a virtual format and will focus on several fundamental aspects of CMP.<\/p>\n\n\n\n<p>The symposium will consist of <strong>talks given by experts in the field<\/strong> (invite only; confirmed speakers are listed below) and <strong>contributed scientific posters<\/strong> (see information below).<\/p>\n\n\n\n<p>The presentations will be given <strong>Monday August 16 &#8211; Thursday August 19 from<\/strong> <strong>8am until approx. 1pm<\/strong> <em><strong>US Pacific Time<\/strong><\/em> <strong>each day<\/strong>.\u00a0The presentations will be hosted on the &#8220;Engagez&#8221; platform. Each registrant will receive login details for the platform a week or so before the symposium.\u00a0<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Monday August 16: 8am-10:10am<\/strong> <strong>Session I<\/strong><br>\u00a0 Symposium Welcome<br><strong><em>\u00a0 Keynote<\/em> &#8211;<\/strong> <em><strong>Dr. Manabu Tsujimora<\/strong> (EBARA Corp.)<\/em><br>\u00a0 Invited Speakers, Topic: <em>Cleans<\/em><\/li>\n\n\n\n<li><strong>Monday August 16: 10:25am-12pm<\/strong> <strong>Session II<\/strong><br>\u00a0 Invited Speakers, Topic: <em>Fundamentals<\/em><\/li>\n\n\n\n<li><strong>Tuesday August 17: 8am-10:05am<\/strong> <strong>Session III<\/strong><br>\u00a0 Invited Speakers, Topic: <em>Cleans<\/em><\/li>\n\n\n\n<li><strong>Tuesday August 17: 10:20am-12pm<\/strong> <strong>Session IV<\/strong><br>\u00a0 Invited Speakers, Topic: <em>CMP in Bonding Applications<\/em><\/li>\n<\/ul>\n\n\n\n<p><a role=\"button\" href=\"https:\/\/www.engagez.net\/camp-cmp-symposium\">Click here to access Engagez.net symposium site<\/a><\/p>\n\n\n\n<p>(You must register to access the symposium website within Engagez.net)<\/p>\n\n\n\n<ul class=\"wp-block-list\">\n<li><strong>Wednesday August 18: 8am-10:05am<\/strong> <strong>Session V<\/strong><br>\u00a0 Invited Speakers, Topic: <em>Defects<\/em><\/li>\n\n\n\n<li><strong>Wednesday August 18: 10:20am-12pm<\/strong> <strong>Session VI<\/strong><br>\u00a0 Invited Speakers, Topic: <em>Pad Conditioning<\/em><\/li>\n\n\n\n<li><strong>Thursday August 19: 8am-10:05am<\/strong> <strong>Session VII<\/strong><br>\u00a0 Invited Speakers, Topic: <em>Equipment Roadmap<\/em><\/li>\n\n\n\n<li><strong>Thursday August 19: 10:20am-12pm<\/strong> <strong>Session VIII<\/strong><br>\u00a0 Invited Speakers, Topic: <em>Particles<\/em><\/li>\n<\/ul>\n\n\n\n<p>The button below provides the full program, including speaker times, titles, etc. Version below is of August 12, 2021. \u00a0 \u00a0\u00a0<strong style=\"letter-spacing: 0.4px;\">***<em>Schedule is subject to change<\/em>***<\/strong><a role=\"button\" href=\"https:\/\/drive.google.com\/file\/d\/1fBY3e0EOB7rkZ-1E2Q2V_X4Hc7NYbBeW\/view?usp=sharing\" target=\"_blank\" rel=\"noopener\"><br>Downloadable PDF of program<\/a><\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>PLANNING COMMITTEE<\/strong><\/h4>\n\n\n\n<p><strong>Jihoon Seo<\/strong>&nbsp;(Clarkson University)<\/p>\n\n\n\n<p><strong>Ekaterina Mikhaylichenko<\/strong> (AMAT)<\/p>\n\n\n\n<p><strong>Chao-Chang Arthur Chen<\/strong>&nbsp;(National Taiwan U. of S&amp;T)<\/p>\n\n\n\n<p><strong>Ashwin Chockalingam<\/strong>&nbsp;(AMAT)<\/p>\n\n\n\n<p><strong>Paul Feeney<\/strong>&nbsp;(Consultant)<\/p>\n\n\n\n<p><strong>Hirokuni Hiyama<\/strong>&nbsp;(Ebara)<\/p>\n\n\n\n<p><strong>Taesung Kim<\/strong>&nbsp;(SKKU)<\/p>\n\n\n\n<p><strong>Dinesh Koli<\/strong>&nbsp;(Intel)<\/p>\n\n\n\n<p><strong>Raghuveer Patlolla<\/strong>&nbsp;(IBM)<\/p>\n\n\n\n<p><strong>Mike Pevny<\/strong>&nbsp;(3M)<\/p>\n\n\n\n<p><strong>Ara Philipossian<\/strong>&nbsp;(Araca)<\/p>\n\n\n\n<p><strong>Matthew Prince<\/strong>&nbsp;(Intel)<\/p>\n\n\n\n<p><strong>Bob Roberts<\/strong>&nbsp;(Axus Technology)<\/p>\n\n\n\n<p><strong>Gerfried Zwicker<\/strong>&nbsp;(Consultant)&nbsp;<\/p>\n\n\n\n<p><strong>Devon Shipp<\/strong> (CAMP Director, Clarkson University)<\/p>\n\n\n\n<p><strong>Elisabeth Cain<\/strong> (CAMP Business Development Manager, Clarkson U.)<\/p>\n\n\n\n<p><strong>Leila Boyea<\/strong> (CAMP Admin., Clarkson U.)<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>INSTRUCTIONS FOR SPEAKERS:<\/strong><\/h4>\n\n\n\n<p>Invited speakers will present their work either:<\/p>\n\n\n\n<p>(1) <em>Live<\/em> (via Zoom through the Engagez platform), or<\/p>\n\n\n\n<p>(2) <em>Pre-recorded<\/em> (broadcast through Engagez at a time allocated in the agenda).<\/p>\n\n\n\n<p><strong>All invited speakers<\/strong> should submit their <em><strong>headshot<\/strong><\/em> (jpg file) and <em><strong>1-page abstract<\/strong><\/em> (150-500 words, written in English, and can include 1 figure or table; submit a Word document or similar) by <em><strong>July 20<\/strong><\/em> to <a href=\"mailto:camp@clarkson.edu\">camp@clarkson.edu<\/a>.<\/p>\n\n\n\n<p>The <em><strong>pre-recorded speakers<\/strong><\/em> should submit their recording (<strong>mp4 file only<\/strong>) to Engagez directly, following the directions detailed in emails sent to each pre-recorded speaker.<\/p>\n\n\n\n<h4 class=\"wp-block-heading\"><strong>CONFIRMED SPEAKERS<\/strong><\/h4>\n\n\n\n<p><strong>Dr. Manabu Tsujimura<\/strong> &#8211; <em><strong>Keynote Speaker<\/strong><\/em> (Ebara Corp.)<\/p>\n\n\n\n<p><strong>Professor Andrew Martin<\/strong>&nbsp;&amp; <strong>Dr. Imtisal E. Noor<\/strong> (KTH Royal Int. Tech., Sweden)<\/p>\n\n\n\n<p><strong>Dr. Hong Jin Kim<\/strong> (GLOBALFOUNDRIES)<\/p>\n\n\n\n<p><strong>Dr. Jihoon Seo<\/strong> (Clarkson University)<\/p>\n\n\n\n<p><strong>Dr. Jason Keleher<\/strong> (Lewis University)<\/p>\n\n\n\n<p><strong>Dr. Lieve Teugels<\/strong>&nbsp;(IMEC)<\/p>\n\n\n\n<p><strong>Dr. Leonard Borucki<\/strong> (Araca)<\/p>\n\n\n\n<p><strong>Dr. Viorel Balan<\/strong> (CEA\/Leti)<\/p>\n\n\n\n<p><strong>Dr. Ruben Ghulghazaryan<\/strong>&nbsp;&amp; <strong>Davit Piliposyan<\/strong> (Siemens Industry Software CJSC)<\/p>\n\n\n\n<p><strong>Catharina Rudolph<\/strong> (Fraunhofer IZM-ASSID)<\/p>\n\n\n\n<p><strong>Dr. Marcus Kavaljer<\/strong> (KxS Technologies)<\/p>\n\n\n\n<p><strong>Dr. Robert Vacassy<\/strong> (EMD Electronics)<\/p>\n\n\n\n<p><strong>Professor Syuhei Kurokawa<\/strong> (Kyushu University)<\/p>\n\n\n\n<p><strong>Professor Takeshi Fukuma<\/strong> (Kanazawa University)<\/p>\n\n\n\n<p><strong>Associate Professor Panart Khajornrungruang<\/strong> (Kyushu Institute of Technology)<\/p>\n\n\n\n<p><strong>Assistant Professor Yohei Hashimoto<\/strong> (Kanazawa University)<\/p>\n\n\n\n<p><strong>Dr. Sridevi Alety<\/strong> (BASF)<\/p>\n\n\n\n<p><strong style=\"letter-spacing: 0.4px;\">Professor Keita Ando<\/strong> (Keio University)<\/p>\n\n\n\n<p><strong>Naoyuki Handa<\/strong> (Ebara Corp.)<\/p>\n\n\n\n<p><strong>Dr. Brian Zhang<\/strong> (Applied Materials)<\/p>\n\n\n\n<p><strong>Dr. Yufei Chen<\/strong> (Applied Materials)<\/p>\n\n\n\n<p><strong>Bradley Wood<\/strong> (Entegris)<\/p>\n\n\n\n<p><strong>Prof. Sanha Kim<\/strong> (KAIST)<\/p>\n\n\n\n<p><strong>Dr. Brian Salazar<\/strong> (U. California &#8211; Berkeley)<\/p>\n\n\n\n<p><strong>Dr. Nagendra Prasad Yerriboina<\/strong> (Hanyang U.)<\/p>\n\n\n\n<p><strong>Dr. Taesung Kim<\/strong> (Sungkyunkwan U.)<\/p>\n\n\n\n<p><strong>Prof. Hyunseop Lee<\/strong> (Dong-A U.)<\/p>\n\n\n\n<p><strong>Dr. Ji-Chul Yang<\/strong> (Ebara Corp.)<\/p>\n\n\n\n<p><strong>Dr. Jimmy Granstrom<\/strong> &amp; Dr.&nbsp;<strong>Hisashi Takeda<\/strong> (Fujimi Corp.)<\/p>\n\n\n\n<p><strong>Dr. Prasad Bhosale<\/strong> (IBM)<\/p>\n\n\n\n<p><strong>Dr. David Slutz<\/strong> (Diamonex)<\/p>\n\n\n\n<p><strong>Dr. Wei-Tsu Tseng<\/strong> (IBM)<\/p>\n","protected":false},"excerpt":{"rendered":"<p>larkson University&#8217;s Center for Advanced Materials Processing (CAMP) and the NCCAVS CMP Users Group invites you to attend the 24th International Symposium on Chemical-Mechanical Planarization. 24th International Symposium on Chemical-Mechanical Planarization\u200b Monday, August 16 &#8211; Thursday, August 19, 2021The meeting will be held online Talks to begin 8am US Pacific Time each day Click Here [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":0,"menu_order":0,"comment_status":"closed","ping_status":"closed","template":"","meta":{"advgb_blocks_editor_width":"","advgb_blocks_columns_visual_guide":"","footnotes":""},"class_list":["post-1033","page","type-page","status-publish","hentry"],"coauthors":[],"author_meta":{"author_link":"https:\/\/sites.clarkson.edu\/camp\/author\/moeler\/","display_name":"moeler"},"relative_dates":{"created":"Posted 1 year ago","modified":"Updated 1 year ago"},"absolute_dates":{"created":"Posted on October 10, 2024","modified":"Updated on October 10, 2024"},"absolute_dates_time":{"created":"Posted on October 10, 2024 5:26 pm","modified":"Updated on October 10, 2024 5:26 pm"},"featured_img_caption":"","featured_img":false,"series_order":"","_links":{"self":[{"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/pages\/1033","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/comments?post=1033"}],"version-history":[{"count":1,"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/pages\/1033\/revisions"}],"predecessor-version":[{"id":1034,"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/pages\/1033\/revisions\/1034"}],"wp:attachment":[{"href":"https:\/\/sites.clarkson.edu\/camp\/wp-json\/wp\/v2\/media?parent=1033"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}